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Pengaruh implantasi ion tin (Titanium Nitrida) terhadap sifat mekanis baja VCL 140
Abstract
Implantasi ion dapat meningkatkan sifat mekanik seperti kekerasan bahan yang akan digunakan untuk komponen dan peralatan proses manufaktur. Implantasi ion dipengaruhi oleh jenis ion dopan, waktu dan energi yang digunakan. Penelitian ini dilakukan untuk mengetahui pengaruh energi dan waktu implantasi ion titanium nitrida terhadap kekerasan dan struktur mikro pada baja VCL 140. Implantasi dilakukan pada arus berkas tetap 10 yA. Variasi waktu 60, 70, 80, 90, 100, 110, 120 menit, energi 75 keV dan variasi energi 15, 30, 45, 60, 75, 90 dan 100 keV dengan waktu implantasi 100 menit dilakukan untuk mendapatkan kekerasan optimum. Uji Kekerasan menggunakan metode Vickers dengan beban 10 gram dan waktu 10 detik. Topografi dari lapisan TIN diamati menggunakan scanning electron microscopy (SEM) dan komposisi kimia dari lapisan TIN dianalisa menggunakan energy dispersive spectroscopy (EDS).
Kata kunci : Implantasi ion, VCL 140, kekerasan
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DOI: http://dx.doi.org/10.30811/jp.v8i1.1337
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